Can raking in grass seed little too much damage the seeds?

No, at this stage I don't think you've done much damage but leave them alone now so they can get settled into the soil. Don't worry about a few puddles or even some soil compaction. I run a heavy roller over after I've seeded grass so that the seed makes good firm contact with the soil. I also sprinkle about 1/2" of ground peat moss over the top to hold moisture and protect the early seedlings from the hot sun during the day. Of course I water only in the late evening.